Wisconsin Parts Database Instructions and Discussion Team/Group > WISCONSIN
> Motors and tools
> Replace
> Used
> With Warranty
> Brooks fabexpress efem w/ wafer handler & 2 load ports
Brooks fabexpress efem w/ wafer handler & 2 load ports
Brooks FabExpress EFEM w/ Wafer Handler & 2 Load Ports
* FabExpress FX 2000 EFEM with spaces for TWO load ports 003-1000-89
* Series 8 Robot Controller 002-6400-27
* Robot Teach Pendant XPTN30R2-1-ES-BROOKS2
* InLigner Wafer Aligner 002-7391-10
* Devicenet Interface 101905
* CleanFlow Filter Fan Unit 2000FFU 105739
