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> New ham-let uhp stainless gas valves HMS20 4VKLC rnd
New ham-let uhp stainless gas valves HMS20 4VKLC rnd
The part number (HMS20 4VKLC RND) breaks down as follows:
S: Mounting - UCV Surface Mount
4: Body Size - 1/4" (Modular 1.125 inch)
V: Body Raw Material - 316L VIM/VAR
KL*: Seat Material - Kalrez? PCTFE?*
C: Actuation Device - Air Operated N.C. 150 psi**
RND: (The Ham-Let catalog does not say, but I'm guessing it refers to the 1/8" Legris push-to-connect air fitting)
Each valve has a little white sticker on top, and each sticker is different. The one in the pictures says PV32, but yours will say something else.
*The valve body says PCTFE seats, but the seat material designator in the part number indicates "KL." However, no "KL" seat information is listed in the Ham-Let catalog.
The Ultra Clean Series Valves offer a surface mount body design. The surface mount design complies with SEMI PR 3.1 for 1.112'' C-seal. HMS Series is manufactured according to UHP specifications of SEMI F-20 with manual and pneumatic operating mechanisms.
Body: Stainless steel, 316L Vim/Var
Seat Holder: Stainless steel, 316L Vim/Var
Actuation Device: Pneumatic A6061T6
Structure: Direct-seal, metal-diaphragm valve without seal packing, manually and pneumatically operated.
Pressure - Low Pressure: Vacuum to 150 psi (10 bar)
Operating Temperature: Standard: 14 to140F, -10 to 80C (PCTFE Seat)
Inboard Leakage: < 1x10-9 atm cc He/sec
Outboard Leakage: < 1x10-9 atm cc He/sec
Across the Seat Leakage: < 1x10-9 atm cc He/sec
Particles: No particles detected above 0.1um
Surface Finish Ra (Ave)-Standard: 5 in
Actuator Air Supply (Pneumatic): 60 to 90 psig (4 to 6 bar)
Air Connection (Pneumatic): Thread 10-32 UNF
The HAM-LET UCV HMS Series meets and complies with the chemical composition and the mechanical properties of Stainless Steel 316L, according to ASTM A276 specifications. The material is manufactured by VIM/VAR process.
The body material of the UCV HMS Series Valves complies with SEMI F20 - Sulfur content is lower or equal to 0.01 percent.
The HAM-LET UCV HMS Series meets and complies with ASME Y14.5 and Interface Specification for 1.125 Inch Chemical Delivery Component, in compliance with Applied Material Specification PART NO. 0251-01727 REV:002.
All wetted parts have an average surface roughness (Ra ave) of 5 microinch Ra, and maximum surface roughness (Ra max) of 10 microinch Ra, in compliance with ISO 4288.
HAM-LET UCV HMS Valves substrate sealing surfaces have a hardness of minimum 300 Vickers, and they comply with ISO 6507.
