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> Brooks fabexpress efem w/ wafer handler & 3 load ports
Brooks fabexpress efem w/ wafer handler & 3 load ports
Brooks FabExpress EFEM w/ Wafer Handler & 3 Load Ports
* FabExpress FX 3000 EFEM with spaces for THREE load ports 109752-227
* Robot Track (Y axis) 002-8761-01
* Series 8 Robot Controller 106513
* Robot Teach Pendant BROOKS2-PTN30R2-1-ES 112033
* 2pcs. BOLTS Load Port Modules 002-7200-21
* BOLTS Load Port Module 002-7560-03
* InLigner Wafer Aligner 100903
* 2pcs. Devicenet Interfaces 108378
* CleanFlow Filter Fan Unit 3000FFU 105767
* Keyence Light Curtain SL-C16H
* Kramer Tools Firewire Repeater/HUB VS-4FW
* Arista Industrial Touchscreen LCD Monitor ADM-1815BP
* Keytronic keyboard with trackball
The FabExpress (FX) atmospheric system is a bridge system designed to simultaneously handle 200mm and 300mm wafers. It is optimized with the Brooks Reliance robotics automation component set (robot and aligner) and the Brooks family of Load Port Modules qualified by 300mm fabs.
