Wisconsin Parts Database Instructions and Discussion Team/Group > ILLINOIS
> Machine Parts
> Add
> Used
> With Warranty
> Sfi endeavor 8600 cluster sputtering tool
Sfi endeavor 8600 cluster sputtering tool
Includes main cluster tool with 6 capability complete with remote
racks and chamber turbo pumps, Loadlock, Transfer Chamber, 4 PVD
Chambers, 1 Sputter Etch/Ion Mill, electronics cabinets for all process
modules, remote monitor and keyboard.
Includes (6) Remote racks of equipment that include:
Racks 1, 3, 5, 6: Turbo pump power supply, Rack mount PC-210,
Computer Interface Unit, Omega Engineering unit, AE ATX-600 and
Rack 2: Turbo pump power supply, Rack mount PC-210, Computer
Interface Unit, Omega Engineering unit, AE ATX-600 and RFX-600, AE
Rack 4: Turbo pump power supply, Rack mount PC-210, Display and
disk drive unit, Computer Interface Unit, Omega CN3000, Omega set
point unit, Ion Tech Inc IT 35 HC, IT 40 Discharge, IT 50 Beam, IT 60
Accelerator, IT 75 HCN, IT 81 Controller, main breaker unit
