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> Astex ecr cvd source for diamond like carbon dlc - uhv
Astex ecr cvd source for diamond like carbon dlc - uhv
Surplus from PlasmaTherm is an ASTEX 2450 MHz based ECR plasma source mounted on a 10 inch conflat flange that was intended for use in the production of diamond like carbon thin films. Notes that came with the source indicate it was rebuilt with a new quartz dome and C seals, used once for a 30 minute deposition test run then put into storage. There is basically no etching of the quartz visible so this seems to be likely. I will also include a 6" diameter quartz gas flood ring if you would like
